Nanoimprint Lithography: An Enabling Process for Nanofabrication
€206.90
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Product Information
| ISBN | 9783662510865 |
|---|---|
| Publisher | Springer-Verlag Berlin and Heidelberg GmbH & Co. KG |
| Price (excl. tax) | €195.19 |
| Tax | €11.71 |
| Price (incl. tax) | €206.90 |
| Availability | 1 unit in external warehouse |
Product Description
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes.