Microlithography
€82.90
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Product Information
| ISBN | 9781032836737 |
|---|---|
| Publisher | Taylor & Francis Ltd |
| Price (excl. tax) | €78.21 |
| Tax | €4.69 |
| Price (incl. tax) | €82.90 |
| Availability | 1 unit in external warehouse |
Product Description
Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices.