Fundamental Principles of Optical Lithography
€92.90
Available for sending in 4/5 days
Product Information
| ISBN | 9780470727300 |
|---|---|
| Publisher | John Wiley & Sons Inc |
| Price (excl. tax) | €87.64 |
| Tax | €5.26 |
| Price (incl. tax) | €92.90 |
| Availability | 2 units in external warehouse |
Product Description
Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter.